| 000 | 00551nam a22002057a 4500 | ||
|---|---|---|---|
| 001 | 32095 | ||
| 003 | BD-DhUET | ||
| 008 | 150729b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471924784 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.8152 _bMOR/1983 |
||
| 100 | _aMorgan, D. V. | ||
| 245 | _aIntroduction to semiconductor microtechnology | ||
| 250 | _a2nd ed. | ||
| 260 |
_a New York _b John Wiley & Sons _c1983 |
||
| 300 |
_a xiv, 208p. _billus. |
||
| 650 | 0 | _aSemiconductors : Design and construction | |
| 700 | _aBoard, K. | ||
| 942 | _cGB | ||
| 999 |
_c32095 _d32095 |
||