| 000 | 00660nam a22002057a 4500 | ||
|---|---|---|---|
| 001 | 32768 | ||
| 003 | BD-DhUET | ||
| 008 | 150906b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0803104596 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.815 _bEME/1987 |
||
| 111 |
_aSymposium on emerging semiconductor technology _cSan Jose, CA _d28/1/1986 _n4th |
||
| 245 | _aEmerging semiconductor technology | ||
| 260 |
_aPhiladelphia _bAmerican Society for Testing and Materials _c1987 |
||
| 300 |
_a704p. _bill. |
||
| 490 | _aASTM special technical publication, 960 | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 |
_aSemiconductor Industry _zCongress |
|
| 942 | _cPRC | ||
| 999 |
_c32768 _d32768 |
||