| 000 | 00642nam a22001817a 4500 | ||
|---|---|---|---|
| 001 | 34856 | ||
| 003 | BD-DhUET | ||
| 008 | 151014b xxu||||| |||| 00| 0 eng d | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a621.549 _bSYM/1962 |
||
| 111 |
_aSymposium on cleaning and materials processing for electronics and space apparatus _cLos Angeles _d1/10/1962 |
||
| 245 | _aSymposium on cleaning and materials processing for electronics and space apparatus | ||
| 260 |
_aPhiladelphia _bAmerican Society for Testing and Materials _c1963 |
||
| 300 |
_avi, 266 p. _bill. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aSemiconductors | |
| 942 | _cPRC | ||
| 999 |
_c34856 _d34856 |
||