| 000 | 00595nam a22002177a 4500 | ||
|---|---|---|---|
| 001 | 34977 | ||
| 003 | BD-DhUET | ||
| 008 | 151019b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0750303115 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.817302 _bGLO/1995 |
||
| 100 | _aGlocker, David A. | ||
| 245 | _aHandbook of thinfilm process technology | ||
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bIOP Publishing _c1995 |
||
| 300 | _axii,various paging | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aThinflim technology - Handbooks,manuals, etc. | |
| 700 | _aShah, S. Ismat | ||
| 942 | _cEB | ||
| 999 |
_c34977 _d34977 |
||