| 000 | 00707nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | 35280 | ||
| 003 | BD-DhUET | ||
| 008 | 890418s1989 paua b 101 0 eng | ||
| 020 | _a0803112734 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.815 _bINT/1989 |
||
| 111 |
_aInternational symposium on semiconductor fabrication _cSanta Clara _d02/01/1988 _n5th |
||
| 245 | 0 | 0 |
_aSemiconductor fabrication _btechnology and metrology |
| 260 |
_aPhiladelphia _bASTM _c1989 |
||
| 300 |
_aviii,476p. _bill. _c24 cm. |
||
| 490 | _aASTM special technical publication;990 | ||
| 500 | _aASTM publication code number (PCN) 04-990000-46 | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aSemiconductors | |
| 942 | _cPRC | ||
| 999 |
_c35280 _d35280 |
||