000 00608nam a2200205 a 4500
001 36525
003 BD-DhUET
008 930721s1994 njua b 001 0 eng
020 _a0815513372
040 _aDLC
_cDLC
_dBD-DhUET
082 0 0 _a667.9
_bBUN/1994
100 _aBunshah, Rointan F.
245 0 0 _aHandbook of deposition technologies for films and coatings
_bscience, technology, and applications
250 _a2nd ed.
260 _aNew Jersey
_bNoyes Publications
_c1994
300 _axxvi, 861p.
_bill.
_c25 cm.
504 _aIncludes bibliographies
650 0 _a Coating process
942 _cEB
999 _c36525
_d36525