| 000 | 00413nam a2200157 4500 | ||
|---|---|---|---|
| 003 | BD-DhUET | ||
| 008 | 161024b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781682853207 | ||
| 040 |
_c0 _dBD-DhUET |
||
| 100 | _aVersuh, Eve | ||
| 245 |
_aMicroelectromechanical systems _badvanced technologies and devices |
||
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bWillford press _c2016 |
||
| 300 | _avi, 274p. | ||
| 942 | _cEB | ||
| 999 |
_c39543 _d39543 |
||