000 00556nam a22002055i 4500
001 40307
003 BD-DhUET
008 160527s2016 nyu 000 0 eng
020 _a9783319393599
040 _aDLC
_beng
_c0
_dBD-DhUET
082 _a623.815
_bCUI/2017
100 _aCui, Zheng
245 0 0 _aNanofabrication
_bprinciples, capabilities and limits
250 _a2nd ed.
260 _aSwitzerland
_bSpringer International Publishing
_c2017
300 _axvii, 432p.
504 _aIncludes bibliographies
650 0 _aNanotechnology
942 _cGB
999 _c40307
_d40307