| 000 | 00619nam a2200217 a 4500 | ||
|---|---|---|---|
| 001 | 40336 | ||
| 003 | BD-DhUET | ||
| 008 | 061219s2008 flua bf 001 0 eng | ||
| 020 | _a1574446754 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.815202 _bDOE/2008 |
||
| 100 | _aDoering, Robert | ||
| 245 | 0 | 0 | _aHandbook of semiconductor manufacturing technology |
| 250 | _a2nd ed. | ||
| 260 |
_aLondon _bTaylor & Francis _c2008 |
||
| 300 | _aVarious pagings | ||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aSemiconductors-Design and construction-Handbooks, manuals, etc. | |
| 700 | _aNishi, Yoshio | ||
| 942 | _cEB | ||
| 999 |
_c40336 _d40336 |
||