000			00589cam a22001935i 4500
001			45298
003			BD-DhUET
008			250326s2021 ru 000 0 und
020			_a9781420055115
040			_aDLC _beng _c0 _dBD-DhUET
100			_aMadou, Marc J.
245			_aFundamentals of microfabrication and nanotechnology
250			_a3rd ed.
260			_aBoca Raton _bTaylor & Francis _c2012
300			_axiii, 641 p.
500			_aVolume I Solid-state physics, fluidics, and analyticial techniques in micro-and nanotechnology
504			_aIncludes bibliographies
942			_cGB
999			_c45298 _d45298