| 000 | 00572nam a22001937a 4500 | ||
|---|---|---|---|
| 001 | 45317 | ||
| 003 | BD-DhUET | ||
| 008 | 250705b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420055160 | ||
| 040 |
_c0 _dBD-DhUET |
||
| 100 | _aMadou, Marc J. | ||
| 245 | _aFundamentals of microfabrication and nanotechnology | ||
| 250 | _a3rd ed. | ||
| 260 |
_aBoca Raton _bTaylor & Francis _c2012 |
||
| 300 | _axiii, 636p. | ||
| 500 | _aVolume III From MEMS to Bio-MEMS and Bio-NEMS :manufacturing techniques and applications | ||
| 504 | _aIncludes bibliographies | ||
| 942 | _cGB | ||
| 999 |
_c45317 _d45317 |
||