| 000 | 00564nam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | 6234 | ||
| 003 | BD-DhUET | ||
| 008 | 810723s1982 nyua b 001 0 eng | ||
| 020 | _a0070192383 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 | 0 | 0 |
_a623.8173 _bELL/1982 |
| 100 | 1 | _aElliott, David J. | |
| 245 | 1 | 0 |
_aIntegrated circuit fabrication technology _cby David J. Elliott |
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bMcGraw-Hill _c1982 |
||
| 300 |
_axvii, 405 p. _bill. _c24 cm. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aIntegrated circuits | |
| 942 | _cGB | ||
| 999 |
_c6234 _d6234 |
||