| 000 | 00642nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | 6243 | ||
| 003 | BD-DhUET | ||
| 008 | 850806s1986 nyua b 001 0 eng | ||
| 020 | _a0070193045 | ||
| 040 |
_aDLC _cDLC _dBD-DhUET |
||
| 082 |
_a623.8173 _bELL/1986 |
||
| 100 | 1 | _aElliott, David J. | |
| 245 | 1 | 0 |
_aMicrolithography _bprocess technology for IC fabrication _cby David J. Elliott |
| 250 | _aIst ed. | ||
| 260 |
_aNew York _bMcGraw-Hill _c1986 |
||
| 300 |
_axix, 378 p. _bill. _c24 cm. |
||
| 504 | _aIncludes bibliographies | ||
| 650 | 0 | _aIntegrated circuits | |
| 650 | 0 | _aMicrolithography | |
| 650 | 0 | _aPhotoresists | |
| 942 | _cGB | ||
| 999 |
_c6243 _d6243 |
||