000 00713nam a22002174a 4500
001 828
003 BD-DhUET
008 060905s2007 nyua sb 001 0 eng d
020 _a9780387368009
040 _aCOO
_cCOO
_dBD-DhUET
082 _a623.81
_bLOB/2007
100 1 _aLobontiu, Nicolae.
245 1 0 _aDynamics of microelectromechanical systems/
_cby Nicolae Lobontiu.
250 _a1st ed.
260 _aNew York :
_bSpringer Science,
_c2007.
490 1 _aMicrosystems ;
504 _aIncludes bibliographies
650 0 _aMicroelectromechanical systems.
942 _cGB
856 4 0 _uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio7917407
_zFull text available from SpringerLink ebooks - Engineering (2007)
999 _c828
_d828