000 00543nam a22002057a 4500
001 8621
003 BD-DhUET
008 150124b xxu||||| |||| 00| 0 eng d
020 _a9789814411066
040 _c0
_dBD-DhUET
082 _a623.81
_bLAW/2014
100 _aLawes, Ron
245 _aMEMS cost analysis
_bfrom laboratory to industry
250 _aIst ed.
260 _aSingapore
_b Pan Stanford Publishing
_c2014
300 _a xvi,289p.
504 _aIncludes bibliographies
650 0 _aMicroelectromechanical systems
942 _cGB
999 _c8621
_d8621