| 000 | 00650nam a22002177a 4500 | ||
|---|---|---|---|
| 001 | 941 | ||
| 003 | BD-DhUET | ||
| 008 | 091014s2010 nyua b 001 0 eng d | ||
| 020 | _a9780387095103 | ||
| 040 |
_aITD _cITD _dBD-DhUET |
||
| 082 | 0 | 4 |
_a623.81/ _bADA/2010 |
| 100 | 1 | _aAdams, Thomas M. | |
| 245 | 1 | 0 |
_aIntroductory MEMS : _bfabrication and applications / _cby Thomas M. Adams, Richard A. Layton. |
| 250 | _aIst ed. | ||
| 260 |
_aNew York : _bSpringer, _c2010. |
||
| 300 |
_axv, 444 p. : _bill. (some col.) ; _c25 cm. |
||
| 504 | _aIncludes bibliographies. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 | _aLayton, Richard A. | |
| 942 | _cGB | ||
| 999 |
_c941 _d941 |
||