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Browsing by Subject "Reactive sputtering phenomena"

Browsing by Subject "Reactive sputtering phenomena"

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  • Study of reactive sputtering phenomena for producing oxide thin films 
    Israt Jahan (Department of Electrical and Electronic Engineering, 2001-05)
    Reactive sputtering is a technique to deposit compound thin films such as oxide, nitride, etc. It is well known that in reactive sputtering there are two operation modes: metal mode and compound mode. The transition ...