Sugano, Takuo
Applications of plasma processes to VLSI technology edited by Takuo Sugano ; translated by Hyo-gun Kim - New York John Wiley & Sons 1978 - xiv, 394 p. ill. 24 cm.
Includes bibliographies
0471869600
Semiconductors
Integrated circuits
623.8173 / SUG/1978
Applications of plasma processes to VLSI technology edited by Takuo Sugano ; translated by Hyo-gun Kim - New York John Wiley & Sons 1978 - xiv, 394 p. ill. 24 cm.
Includes bibliographies
0471869600
Semiconductors
Integrated circuits
623.8173 / SUG/1978