| 000 -LEADER |
|---|
| fixed length control field |
00641nam a2200217 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
11083 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
BD-DhUET |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
850207s1985 nyua b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471869600 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
BD-DhUET |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
623.8173 |
| Item number |
SUG/1978 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Sugano, Takuo |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Applications of plasma processes to VLSI technology |
| Statement of responsibility, etc. |
edited by Takuo Sugano ; translated by Hyo-gun Kim |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
John Wiley & Sons |
| Date of publication, distribution, etc. |
1978 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv, 394 p. |
| Other physical details |
ill. |
| Dimensions |
24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographies |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kim, Hyo-Gun |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Edited Book |