Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
- Ist ed.
- Park Ridge, N.J., U.S.A. : Noyes Publications, 1990.
- xxiii, 523 p. : ill. ; 25 cm
Includes bibliographies.
0815512201 :
Plasma engineering - Handbooks, manuals etc.
621.04402 / ROS/1990
Includes bibliographies.
0815512201 :
Plasma engineering - Handbooks, manuals etc.
621.04402 / ROS/1990