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Handbook of plasma processing technology : (Record no. 2634)

000 -LEADER
fixed length control field 00879nam a2200241 a 4500
001 - CONTROL NUMBER
control field 2634
003 - CONTROL NUMBER IDENTIFIER
control field BD-DhUET
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 890809s1990 njua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0815512201 :
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency BD-DhUET
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.04402
Item number ROS/1990
245 00 - TITLE STATEMENT
Title Handbook of plasma processing technology :
Remainder of title fundamentals, etching, deposition, and surface interactions /
Statement of responsibility, etc. edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
250 ## - EDITION STATEMENT
Edition statement Ist ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. Park Ridge, N.J., U.S.A. :
Name of publisher, distributor, etc. Noyes Publications,
Date of publication, distribution, etc. 1990.
300 ## - PHYSICAL DESCRIPTION
Extent xxiii, 523 p. :
Other physical details ill. ;
Dimensions 25 cm
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographies.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Plasma engineering - Handbooks, manuals etc.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Rossnagel, Stephen M.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Cuomo, J. J.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Westwood, William D.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Edited Book
856 42 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://www.loc.gov/catdir/description/wap041/89022834.html
Holdings
Koha item type Koha date last borrowed Koha full call number Date acquired Price effective from Koha issues (times borrowed) Shelving location Source of classification or shelving scheme Withdrawn status Piece designation (barcode) Not for loan Location (home branch) Koha date last seen Lost status Copy number Damaged status Koha normalized classification for sorting Sublocation or collection (holding branch)
Edited Book2016-06-18621.04402/ROS/19902014-09-282014-09-281Circulation section  97239 Central Library, BUET2018-07-31 1 621_000000000000000_04402ROS19Central Library, BUET