Rossnagel, Stephen M.
Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions - 1st ed. - New York Noyes Publications 1990 - xxiii, 523 p. ill. 25 cm - Materials science and process technology series .
Includes bibliographies
0815512201
Plasma engineering
621.04402 / ROS/1990
Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions - 1st ed. - New York Noyes Publications 1990 - xxiii, 523 p. ill. 25 cm - Materials science and process technology series .
Includes bibliographies
0815512201
Plasma engineering
621.04402 / ROS/1990