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Handbook of plasma processing technology (Record no. 29419)

000 -LEADER
fixed length control field 00827nam a2200253 a 4500
001 - CONTROL NUMBER
control field 29419
003 - CONTROL NUMBER IDENTIFIER
control field BD-DhUET
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 890809s1990 njua b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0815512201
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency BD-DhUET
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.04402
Item number ROS/1990
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Rossnagel, Stephen M.
245 00 - TITLE STATEMENT
Title Handbook of plasma processing technology
Remainder of title fundamentals, etching, deposition, and surface interactions
250 ## - EDITION STATEMENT
Edition statement 1st ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New York
Name of publisher, distributor, etc. Noyes Publications
Date of publication, distribution, etc. 1990
300 ## - PHYSICAL DESCRIPTION
Extent xxiii, 523 p.
Other physical details ill.
Dimensions 25 cm
490 ## - SERIES STATEMENT
Series statement Materials science and process technology series
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographies
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Plasma engineering
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Cuomo, Jerome J.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Westwood, William D.
856 42 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://www.loc.gov/catdir/description/wap041/89022834.html
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Edited Book
Holdings
Koha item type Koha full call number Sublocation or collection (holding branch) Location (home branch) Damaged status Price effective from Koha date last seen Copy number Koha normalized classification for sorting Piece designation (barcode) Date acquired Lost status Source of classification or shelving scheme Not for loan Shelving location Withdrawn status
Edited Book621.04402/ROS/1990Central Library, BUETCentral Library, BUET 2015-06-162015-06-161621_044020000000000_ROS_1990972382015-06-16   Reading section