Elliott, David J.
Microlithography process technology for IC fabrication by David J. Elliott - Ist ed. - New York McGraw-Hill 1986 - xix, 378 p. ill. 24 cm.
Includes bibliographies
0070193045
Integrated circuits
Microlithography
Photoresists
623.8173 / ELL/1986
Microlithography process technology for IC fabrication by David J. Elliott - Ist ed. - New York McGraw-Hill 1986 - xix, 378 p. ill. 24 cm.
Includes bibliographies
0070193045
Integrated circuits
Microlithography
Photoresists
623.8173 / ELL/1986