Microlithography process technology for IC fabrication
by Elliott, David J.
Publisher: New York McGraw-Hill 1986Edition: Ist ed.Description: xix, 378 p. ill. 24 cm.ISBN: 0070193045 .Subject(s): Integrated circuits | Microlithography | Photoresists| Item type | Current location | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| General Book | Central Library, BUET Circulation section | 623.8173/ELL/1986 (Browse shelf) | 1 | Available | 81414 |
Includes bibliographies
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