| 000 -LEADER |
|---|
| fixed length control field |
00569nam a2200217 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
28189 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
BD-DhUET |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
911023s1992 nyua b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0306435780 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
BD-DhUET |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
537.622 |
| Item number |
VAL/1992 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Valiev, Kamil A. |
| 245 14 - TITLE STATEMENT |
|---|
| Title |
Physics of submicron lithography |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
1st ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Plenum Press |
| Date of publication, distribution, etc. |
1992 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi, 493 p. |
| Other physical details |
ill. |
| Dimensions |
26 cm. |
| 490 ## - SERIES STATEMENT |
|---|
| Series statement |
Microdevices |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographies |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Lithography, Electron beam |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
General Book |