| 000 -LEADER |
|---|
| fixed length control field |
00707nam a2200217 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
35280 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
BD-DhUET |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
890418s1989 paua b 101 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0803112734 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
BD-DhUET |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
623.815 |
| Item number |
INT/1989 |
| 111 ## - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
International symposium on semiconductor fabrication |
| Location of meeting |
Santa Clara |
| Date of meeting |
02/01/1988 |
| Number of part/section/meeting |
5th |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Semiconductor fabrication |
| Remainder of title |
technology and metrology |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
Philadelphia |
| Name of publisher, distributor, etc. |
ASTM |
| Date of publication, distribution, etc. |
1989 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
viii,476p. |
| Other physical details |
ill. |
| Dimensions |
24 cm. |
| 490 ## - SERIES STATEMENT |
|---|
| Series statement |
ASTM special technical publication;990 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
ASTM publication code number (PCN) 04-990000-46 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographies |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Proceedings |