Semiconductor fabrication technology and metrology
by 5th International symposium on semiconductor fabrication Santa Clara 02/01/1988.
Series: ASTM special technical publication;990.Publisher: Philadelphia ASTM 1989Description: viii,476p. ill. 24 cm.ISBN: 0803112734.Subject(s): Semiconductors| Item type | Current location | Call number | Copy number | Status | Date due | Barcode |
|---|---|---|---|---|---|---|
| Proceedings | Central Library, BUET Reference section | 623.815/INT/1989 (Browse shelf) | 1 | Available | 99489 |
ASTM publication code number (PCN) 04-990000-46
Includes bibliographies
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