Electroceramic-based MEMS : fabrication-technology and applications /
by Setter, N.
Series: Publisher: New York : Springer Science+Business Media, 2005Description: xii, 414 p. : ill. ; 25 cm.ISBN: 0387233105.Subject(s): Microelectromechanical systemsItem type | Current location | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Edited Book | Central Library, BUET Circulation section | 623.81/SET/2005 (Browse shelf) | 1 | Available | 110477 |
Includes bibliographies.
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