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Electroceramic-based MEMS : fabrication-technology and applications /

by Setter, N.
Series: Publisher: New York : Springer Science+Business Media, 2005Description: xii, 414 p. : ill. ; 25 cm.ISBN: 0387233105.Subject(s): Microelectromechanical systems
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Item type Current location Call number Copy number Status Date due Barcode
Edited Book Central Library, BUET
Circulation section 		623.81/SET/2005 (Browse shelf) 1 Available 110477

Includes bibliographies.

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