Fundamentals of microfabrication and nanotechnology
by Madou, Marc J.
Publisher: Boca Raton Taylor & Francis 2012Edition: 3rd ed.Description: xiii, 636p.ISBN: 9781420055160.Item type | Current location | Call number | Copy number | Status | Date due | Barcode |
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General Book | Central Library, BUET Acquisition section | 1 | Available | 120229 | ||
General Book | Central Library, BUET Acquisition section | 2 | Available | 120230 | ||
General Book | Central Library, BUET Acquisition section | 3 | Available | 120231 |
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Volume III
From MEMS to Bio-MEMS and Bio-NEMS :manufacturing techniques and applications
Includes bibliographies
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