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Fundamentals of microfabrication and nanotechnology

by Madou, Marc J.
Publisher: Boca Raton Taylor & Francis 2012Edition: 3rd ed.Description: xiii, 636p.ISBN: 9781420055160.
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Item type Current location Call number Copy number Status Date due Barcode
General Book Central Library, BUET
Acquisition section
1 Available 120229
General Book Central Library, BUET
Acquisition section
2 Available 120230
General Book Central Library, BUET
Acquisition section
3 Available 120231

Volume III
From MEMS to Bio-MEMS and Bio-NEMS :manufacturing techniques and applications

Includes bibliographies

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