Plasma techniques for film deposition (Record no. 30632)

000 -LEADER
fixed length control field 00588nam a2200205Ia 4500
001 - CONTROL NUMBER
control field 30632
003 - CONTROL NUMBER IDENTIFIER
control field BD-DhUET
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 041129s2005 enka b 001 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 184265151X
040 ## - CATALOGING SOURCE
Original cataloging agency ERL
Transcribing agency ERL
Modifying agency BD-DhUET
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 623.8152
Item number KON/2005
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Konuma, Mitsuharu
245 10 - TITLE STATEMENT
Title Plasma techniques for film deposition
250 ## - EDITION STATEMENT
Edition statement 1st ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. Harrow
Name of publisher, distributor, etc. Alpha Science International
Date of publication, distribution, etc. 2005
300 ## - PHYSICAL DESCRIPTION
Extent ix, 337 p.
Other physical details ill.
Dimensions 25 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographies3) and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Plasma-enhanced chemical vapor deposition
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type General Book
Holdings
Shelving location Koha item type Date acquired Koha date last seen Koha normalized classification for sorting Not for loan Lost status Copy number Source of classification or shelving scheme Sublocation or collection (holding branch) Damaged status Price effective from Location (home branch) Piece designation (barcode) Withdrawn status Koha full call number
Reading sectionGeneral Book2015-06-252015-06-25623_815200000000000_ON_2005  1 Central Library, BUET 2015-06-25Central Library, BUET104450 623.8152 /ON/2005