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Applications of plasma processes to VLSI technology

by Sugano, Takuo; Kim, Hyo-Gun.
Publisher: New York John Wiley & Sons 1978Description: xiv, 394 p. ill. 24 cm.ISBN: 0471869600.Subject(s): Semiconductors | Integrated circuits
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Item type Current location Call number Copy number Status Date due Barcode
General Book Central Library, BUET
Circulation section
623.8173/SUG/1978 (Browse shelf) 1 Available 75498

Includes bibliographies

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