Physics of submicron lithography
by Valiev, Kamil A.
Series: Microdevices.Publisher: New York Plenum Press 1992Edition: 1st ed.Description: xi, 493 p. ill. 26 cm.ISBN: 0306435780.Subject(s): Lithography, Electron beamItem type | Current location | Call number | Copy number | Status | Date due | Barcode |
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General Book | Central Library, BUET Reading section | 537.622/VAL/1992 (Browse shelf) | 1 | Available | 89337 |
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537.622/SZE/1969 Physics of semiconductor devices | 537.622/SZE/1969 Physics of semiconductor devices | 537.622/TIW/1992 Compound semiconductor device physics | 537.622/VAL/1992 Physics of submicron lithography | 537.622/YUP/2010 Fundamentals of semiconductors | 537.6221/DAV/1998 Physics of low-dimensional semiconductors | 537.6223/ADA/1994 GaAs and related materials |
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