Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
by Rossnagel, Stephen M; Cuomo, J. J; Westwood, William D.
Publisher: Park Ridge, N.J., U.S.A. : Noyes Publications, 1990Edition: Ist ed.Description: xxiii, 523 p. : ill. ; 25 cm.ISBN: 0815512201 :.Subject(s): Plasma engineering - Handbooks, manuals etcOnline resources: Click here to access onlineItem type | Current location | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Edited Book | Central Library, BUET Circulation section | 621.04402/ROS/1990 (Browse shelf) | 1 | Available | 97239 |
Includes bibliographies.
There are no comments for this item.