Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
by Rossnagel, Stephen M; Cuomo, Jerome J; Westwood, William D.
Series: Materials science and process technology series.Publisher: New York Noyes Publications 1990Edition: 1st ed.Description: xxiii, 523 p. ill. 25 cm.ISBN: 0815512201 .Subject(s): Plasma engineeringOnline resources: Click here to access onlineItem type | Current location | Call number | Copy number | Status | Date due | Barcode |
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Edited Book | Central Library, BUET Reading section | 621.04402/ROS/1990 (Browse shelf) | 1 | Available | 97238 |
Includes bibliographies
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